http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013160813-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-12 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2012-02-01^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8b61fb1219b6bedfe5ba0f57f6bbdbd6 |
| publicationDate | 2013-08-19^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013160813-A |
| titleOfInvention | Resist composition and pattern forming method |
| abstract | A resist composition having excellent lithography properties and a resist pattern forming method are provided. A resist composition comprising a base material component (A) whose solubility in a developing solution is changed by the action of an acid and an acid generator component (B) that generates an acid upon exposure, wherein the acid generation The agent component (B) contains an acid generator (B1) composed of a compound represented by the general formula (b1-1) [X is a hydrocarbon having 1 to 15 carbon atoms which may have a substituent. R 2 is an optionally substituted hydrocarbon group having 1 to 10 carbon atoms, R 3 is a fluorinated alkyl group, v1 is an integer of 1 to 5, and v2 is It is an integer of 0-4. Z + is an organic cation. ] [Chemical 1] [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014029489-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013183689-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014002368-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018039794-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014029491-A |
| priorityDate | 2012-02-01^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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