| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_097405822d505467fd50f7100022cd56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e75dbe74a46e1e3af10225913a7bfb4b |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B21-082 |
| filingDate |
2016-03-14^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b10af9a49df1a58d264bd29f19d0357e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_89365eae55af25c8dc8af089d5412e4b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4e49dd718dffbeb216b9d598e6a10d1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eaae09ff332a623bf7bf0c31eb384e5b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae4fd7ea9abfee9dba0188b88614bd3c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6fe79137bd1bb2fa04343b2684977e96 |
| publicationDate |
2017-09-21^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2017165602-A |
| titleOfInvention |
Method for producing silicon oxynitride crystal |
| abstract |
A method for efficiently producing silicon oxynitride crystals is provided. The present invention is a method for producing a silicon oxynitride crystal by thermally decomposing a polyalkoxysilazane containing a structural unit represented by the following general formula (1). [Chemical 1] (In the formula, R 1 is a hydrocarbon group.) [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018079744-A1 |
| priorityDate |
2016-03-14^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |