http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5184448-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-24 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2009-06-23^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-04-17^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-04-17^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-5184448-B2 |
| titleOfInvention | Polishing pad, method for producing the same, and polishing method |
| priorityDate | 2009-06-23^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Showing number of triples: 1 to 46 of 46.