http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024
Outgoing Links
| Predicate | Object |
|---|---|
| concordantIPC | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| level | 13^^<http://www.w3.org/2001/XMLSchema#integer> |
| symbol | H01L21/02024 |
| modified | 2013-01-01^^<http://www.w3.org/2001/XMLSchema#date> |
| title | Mirror polishing |
| type | http://data.epo.org/linked-data/def/cpc/SubGroup |
| broader | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0201 |
Incoming Links
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