http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H08102456-A

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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2dcebf5a7f7ddc3b081f70e8ce1c4097
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
filingDate 1994-09-30^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_620fb98273a613d9ee67b9f72924e5c7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93ceeb0d11c79973e5939c83f75ef63a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_59b5f4a5bdad9fba7424e776fd8aa0ae
publicationDate 1996-04-16^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H08102456-A
titleOfInvention Electronic material cleaning method and cleaning device
abstract (57) [Abstract] [Purpose] The shape of the waveguide can be controlled with high accuracy, the characteristics are stable, and the guided light can be strongly confined in the width direction, which is suitable for miniaturization and integration. (EN) Provided is a waveguide type optical control element capable of obtaining a large change in refractive index with voltage. [Structure] A high refractive index layer 2 formed on a substrate 1 and having a higher refractive index than the substrate 1, and a groove 4 provided in the high refractive index layer 2 and defining an optical waveguide 3 are provided. A conductor is embedded in this groove to form an electrode, and a voltage is applied to this electrode to branch / merge or modulate the guided light.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7857530-B2
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8206513-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005101539-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7427168-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017033991-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7794924-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009096380-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105537194-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8337629-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011087757-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8137473-B2
priorityDate 1994-09-30^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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