http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2011004787-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 2010-07-05^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2012-12-20^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2011004787-A1 |
| titleOfInvention | Lithographic copolymer and evaluation method thereof |
| abstract | Provided is a method by which the lithographic properties of a lithographic composition comprising a lithographic copolymer can be evaluated without actually preparing the lithographic composition. The step of preparing a test solution by dissolving a copolymer for lithography in a solvent, the step of separating a gel-like substance in the test solution, and the gel state relative to the composition ratio of the constituent units in the copolymer for lithography A composition ratio change rate representing a ratio of a difference obtained by subtracting the composition ratio of the structural unit in the lithography copolymer from the composition ratio of the structural unit in the product, and the lithography copolymer by the composition ratio change rate. The lithographic properties of the lithographic composition it contains are evaluated. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9733564-B2 |
| priorityDate | 2009-07-07^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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