http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101022982-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-2993 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1608 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1472 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2006-09-29^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2011-03-18^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2011-03-18^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101022982-B1 |
| titleOfInvention | Polishing slurry and method of using the same |
| abstract | The polishing slurry according to the invention comprises a liquid medium and a particulate abrasive. Particle abrasives include soft abrasive particles, hard abrasive particles, and colloidal silica particles, wherein the soft abrasive particles have a Mohs hardness of 8 or less and the hard abrasive particles have a Mohs hardness of 8 or more, and the soft abrasive particles and hard particles. Abrasive particles are provided in a weight ratio of at least 2: 1. n n Polishing slurry, liquid media, particle abrasive, soft abrasive particles, hard abrasive particles, colloidal silica particles, cerium oxide particles, diamond particles |
| priorityDate | 2005-09-30^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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