patent/KR-102058912-B1

Predicate	Object
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32807 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32532
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
filingDate	2016-03-02^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	2019-12-24^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate	2019-12-24^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	KR-102058912-B1
titleOfInvention	Apparatus for processing substrate
abstract	The present invention provides a chamber for gas treating a substrate; A first electrode disposed inside the chamber and having a plurality of electrode bars facing the substrate and protruding toward the substrate; And two electrodes provided in the chamber and having a plurality of through-holes through which the electrode penetrates, wherein a distance between the first electrode and the second electrode is narrower than a distance between the electrode and the second electrode. do.
priorityDate	2016-03-02^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Predicate	Subject
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011071498-A
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419518429 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID74123 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61330 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID139070 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419543920 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520721 http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID1969

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