| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2c4724658699489394a6626d2e0e3b23 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-4069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-1173
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-095
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-013
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-1168
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-4611
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T156-1052 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-4611
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F259-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-386
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-1208
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-125
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D151-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F265-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-4664
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L51-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-4069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F291-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 |
| filingDate |
2006-05-19^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f7d2f5863f7bda568295223ab6bd681 |
| publicationDate |
2008-02-15^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20080014969-A |
| titleOfInvention |
Pattern formation method and formation method of multilayer wiring structure |
| abstract |
One aspect of the present invention provides a graft polymer production step of preparing a substrate on which a graft polymer formed by directly chemically bonding with a substrate is formed on the surface thereof, and (II) a graft polymer production surface in which particles are liquid (dispersion medium). A particle dispersion liquid disposing step for disposing a liquid droplet comprising a dispersion liquid dispersed in a predetermined pattern shape by a droplet discharging method; and (III) a layer composed of particles by evaporating a liquid (dispersion medium) from the disposed liquid droplets. It is a pattern formation method containing the particle pattern formation process formed on the said board | substrate in shape.n n n Pattern formation method, multilayer wiring structure |
| priorityDate |
2005-05-20^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |