| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cdabdbf8c635074e37434ef37ac3c9ca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b6a290f29da2cb5b272909ec7c655d00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B15-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B15-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B15-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-06 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B15-00 |
| filingDate |
2011-07-01^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f79853ef51a5faacebfe68c4ea074f47
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e5cee1e71fcdea0a394d22ac35e1c2db
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4bdf0c45d39cc9c6dc9145d3471319ba |
| publicationDate |
2013-01-18^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20130007354-A |
| titleOfInvention |
Silicon Crystal Growth Apparatus and Silicon Crystal Growth Method Using The Same |
| abstract |
Disclosed are a silicon crystal growth apparatus capable of shortening a process time and reducing a manufacturing cost, and a silicon crystal growth method using the same. The silicon crystal growth apparatus of the present invention is provided in a chamber in which silicon crystals grow, a cooling jacket for cooling the outer portion of the silicon sample so that the outer portion of the silicon sample is not melted, and installed so as to be moved up and down above the cooling jacket. And heating means for heating and melting the silicon sample contained in the cooling jacket, and pulling means for raising and lowering the heating means. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017111227-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180032412-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101724291-B1 |
| priorityDate |
2011-07-01^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |