| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ede47b877b6df9c8d0c494cd66f45ae8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_55aefa2f49a85038ace08c06ad733a3a |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-62 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-22 |
| filingDate |
2013-12-17^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_64600da5fef96321567bfa8c13dd7d38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b3280dc7ddd542ecf0ae42cfaea73c1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_70cf56a895aee645c53e1f20f6426c58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6951269bff536e5c258f989381bd468b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93ea70f42872b5a09b99dc681aef8168
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92ae2cd3a2aabb3e294ab1a41222b58f |
| publicationDate |
2015-06-25^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20150070727-A |
| titleOfInvention |
Pellicle film for extreme ultraviolet lithography including graphite-containing thin film |
| abstract |
The present invention relates to a pellicle film for extreme ultraviolet lithography comprising a graphite-containing thin film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11402746-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180120864-A |
| priorityDate |
2013-12-17^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |