http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201205208-A

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filingDate 2011-06-30^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0ba7b215ff6ec205b4a61d9c5a69209
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publicationDate 2012-02-01^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201205208-A
titleOfInvention Method of forming pattern and developer for use in the method
abstract Provided is a method of forming a pattern, including (a) forming a chemically amplified resist composition into a film, (b) exposing the film to light, and (c) developing the exposed film with a developer containing an organic solvent, wherein the developer contains an alcohol compound (X) at a content of 0 to less than 500 ppm based on the total mass of the developer.
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