| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_26fdae74fbcd907febb707706c8aa716 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0042 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-22 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
2019-02-12^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a518f0937781355f4a0611a41bd85ea8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b97ff4ad5e2c4d9103e2683c640c3f94
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bda5d2c1638b5d369d57348d90cf6eb9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b91482321c3208caf52267a108e0a90
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0720e86c927314a128fe63e661907e5 |
| publicationDate |
2019-10-01^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201939575-A |
| titleOfInvention |
Method and device for cleaning substrate and computer program product |
| abstract |
A method and a device for cleaning a substrate, wherein at least one surface of the substrate has a residue to be removed. The method includes: using laser light to scan at least one area on the surface having the residue, thereby heating the surface and the residue; and controlling the heating such that the residue A portion of L is first liquefied so that the liquefied portion of the residue begins to flow toward the solid portion of the residue, thereby forming a meniscus with the solid portion of the residue and partially accumulating in the solid portion On top of it, the resulting thicker layer of residue absorbs more heat to decompose or vaporize. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I756071-B |
| priorityDate |
2018-02-12^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |