| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b7b1787fdafc9a84f27a9e2e702132f8 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-04 |
| filingDate |
2003-11-12^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-07-01^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_860bfafcdf733aed32d0b0570f290b3e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e02a9d5aa9072325e6a09f3530b1d934 |
| publicationDate |
2010-07-01^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I326898-B |
| titleOfInvention |
Copper chemical mechanical polishing solutions using sulfonated amphiprotic agents |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I729095-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I685553-B |
| priorityDate |
2002-11-12^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |