| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_60480587582bf8e0ca64c6076c0646ab |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2001-282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31732
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2826
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31745 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-28 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-26 |
| filingDate |
2016-08-24^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2019-12-11^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c018aca189a5b2626d8507b7b19f22ae
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cea75aef06046b0192314d9efbe548d8 |
| publicationDate |
2019-12-11^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I679409-B |
| titleOfInvention |
CAD-assisted TEM preparation recipe generation |
| abstract |
The present invention provides an improved program workflow and device for S / TEM sample preparation and analysis. The preferred embodiment provides an improved method for the automated formulation of TEM samples, especially for small geometry TEM flakes, which uses CAD data to automatically align the various stages of sample preparation. The procedure automatically verifies and aligns the position of the fiducials generated by the FIB by masking portions of the captured images and then comparing them with the synthetic images from the CAD data. The SEM beam position was verified by comparison with images synthesized from CAD data. The FIB beam position is also verified by comparison with already aligned SEM images or by synthesizing a FIB image from CAD using techniques used to simulate FIB images. The automatic alignment technique herein allows the generation of sample slices at a specified location without operator intervention. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I799786-B |
| priorityDate |
2015-08-31^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |