| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1eb7dcd0649b6f9512be2ce50eb42d21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd446fb0d73aa96d044fea2eaa3c8ebc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R31-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R2201-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2009-155 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-125
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R17-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R17-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-17 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-15 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R17-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-125
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-02 |
| filingDate |
2016-09-13^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-08-28^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44ffdb275c19899fb4f6e6483868f71d |
| publicationDate |
2018-08-28^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10063978-B2 |
| titleOfInvention |
Cantilevered shear resonance microphone |
| abstract |
A MEMS microphone includes a base structure and a piezoelectric resonator body having a first end and a second end. The first end is fixedly supported by the base structure and the second end is free such that the piezoelectric resonator is cantilevered from the base structure. The MEMS microphone further includes a first electrode operably connected to the piezoelectric resonator body and a second electrode operably connected to the piezoelectric resonator body. A controller includes at least one circuit operably connected to the first and second electrodes and configured to drive the piezoelectric resonator body at a shear resonance frequency of the piezoelectric resonator body and to detect a difference in the shear resonance frequency from a baseline resonance frequency resulting from a sound pressure. |
| priorityDate |
2016-09-13^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |