patent/US-2012195797-A1

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012195797-A1

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f47985b7c371b565f319708450999686 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9752eaa266379112fb84e14f8e6df01c http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e012fba9ce229569b425dc39efb2e4b2
classificationCPCAdditional	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0427 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-02818 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2009-02503 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49007
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-036 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-1057
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N33-00
filingDate	2011-01-31^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_89a40e3acc04542a08d8d71ee979bc24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_74380558a5659f963b84fc156f7267bc
publicationDate	2012-08-02^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-2012195797-A1
titleOfInvention	MEMS Sensors with Closed Nodal Anchors for Operation in an In-Plane Contour Mode
abstract	A MEMS sensor includes at least one closed nodal anchor along a predetermined closed nodal path on at least one surface of a resonant mass. The resonant mass may be configured to resonate substantially in an in-plane contour mode. Drive and/or sense electrodes may be disposed within a cavity formed at least in part by the resonant mass, the closed nodal anchor, and a substrate.
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10063978-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9210516-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11656077-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018022620-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108358160-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017023364-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9489807-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9091544-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9599471-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013277776-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10746548-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8631700-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9709595-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9673785-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11313716-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8616056-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019228862-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9426581-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9552705-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015187589-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015310709-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11714100-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-3082054-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8919199-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9869552-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019026456-A1
priorityDate	2011-01-31^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012112765-A1
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID1103 http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID1088 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24857 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458431896

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