| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bb58b7c2b2aed892cf182d5611a3e321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_85ba10ef8d762b2fea556924dddb2d4f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c6313a77e08efd3944d103fc84a2f593
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_85a8ad3785f07f33b146a49c3a3314cb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a6cd870c7023112827bce68b4b01cfc3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7a73654cb38cc4fb5fbec36c6e8234cc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_099413ae0cf5a2b6398b5151766cd260
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eef263d08916330926670695f18f043e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2678a8ee2464f92748f178b2a05e08a2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-001 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B33-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-042 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24 |
| filingDate |
2010-12-28^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2019-04-02^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4104e8a783cdc0bac5f85da8e563fc6e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_864e313e7e74576e396ad04d25ef5d07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_308b94d59539efd373bbf7d2f2a1c08c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a3b2b87151573d8bbcf455185c95fcc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63366c0b85eeaac3942e36a49a3bbf67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c23ba362285ba4f4ec48e3eb8a88b48c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b3a78c4598be86443930e44dceb05225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7208b15d0f289a6a78a4b9af8037a835 |
| publicationDate |
2019-04-02^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10246769-B2 |
| titleOfInvention |
Thin film deposition apparatus |
| abstract |
A thin film deposition apparatus that can be simply applied to produce large-sized display devices on a mass scale and that improves manufacturing yield. The thin film deposition apparatus includes a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; and a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits arranged in a second direction that is perpendicular to the first direction. A deposition is performed while the substrate or the thin film deposition apparatus moves relative to each other in the first direction, and the deposition source, the deposition source nozzle unit, and the patterning slit sheet are formed integrally with each other. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019226078-A1 |
| priorityDate |
2010-01-11^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |