| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_421cadb30fc0074fe61126eb980d19d6 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2223-633
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31732
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-30466
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31745
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-24578 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3174
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-2251
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-222
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-2206
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B15-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-2206
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-2251
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B15-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-244 |
| filingDate |
2017-06-13^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-07-20^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ef6d1c291964d47c97d3c39d45a4122
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_187b2e30f571a46c5ec869f3e26433af |
| publicationDate |
2021-07-20^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-11067391-B2 |
| titleOfInvention |
Charged particle beam device and sample thickness measurement method |
| abstract |
Provided is a charged particle beam device which includes a storage unit that stores relationship information indicating a relationship between intensity or an intensity ratio of a charged particle signal obtained when a layer disposed on the sample is irradiated with the charged particle beam and a thickness of the layer; and a calculation unit that calculates the thickness of the layer as a thickness of the sample by using the relationship information and the intensity or the intensity ratio of the charged particle signal. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11183359-B2 |
| priorityDate |
2017-06-13^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |