| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1eb9cd2af2f87dcf20b0fbbdfe79996e |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0071
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-223
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02348
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-223
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B5-02 |
| filingDate |
2018-07-06^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-11-16^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3919a79b5a5bc1abd14ac3c75ff3a413
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_991cd9fd11d6f755b6b59013924a9a85
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec062f13498578bc54735bf35a70fa65
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_570e1f719c51a06bab4fe8a39e5b5971
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_21fb6c6b7d348e2ed9d5cb93dcc00468
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b2c9765e6bb526fb36d0d247c1989f5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a8714970b8a2877dac70dfd57b753f4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ae9175697a6b521acb2118cfe3d0a3a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e66793aa7c05aa1c2e3d48e2858ad062 |
| publicationDate |
2021-11-16^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-11177131-B2 |
| titleOfInvention |
Method and apparatuses for reducing porogen accumulation from a UV-cure chamber |
| abstract |
Porogen accumulation in a UV-cure chamber is reduced by removing outgassed porogen through a heated outlet while purge gas is flowed across a window through which a wafer is exposed to UV light. A purge ring having specific major and minor exhaust to inlet area ratios may be partially made of flame polished quartz to improve flow dynamics. The reduction in porogen accumulation allows more wafers to be processed between chamber cleans, thus improving throughput and cost. |
| priorityDate |
2005-12-05^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |