http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-223
Outgoing Links
| Predicate | Object |
|---|---|
| title | using diffusion into, or out of, a solid from or into a gaseous phase |
| label | H01L21/223 |
| sameAs | http://data.epo.org/linked-data/def/ipc/H01L21-223 http://www.wipo.int/classifications/ipc/ipcpub/?notion=scheme&symbol=H01L0021223000 |
| broader | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-22 |
Incoming Links
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