Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_62f941494409aea84f621977c5f0ab81 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S257-93 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-033 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0086 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-761 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-761 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 |
filingDate |
2001-01-19^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31f0515dab721c67e68b991ecb81921c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd4c176b4296ca6d1d38a8e2564ceae1 |
publicationDate |
2001-07-05^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2001006248-A1 |
titleOfInvention |
Micromachined device having electrically isolated components and a method for making the same |
abstract |
A micromachined structure having electrically isolated components is formed by thermomigrating a dopant through a substrate to form a doped region within the substrate. The doped region separates two portions of the substrate. The dopant is selected such that the doped region electrically isolates the two portions of the substrate from each other via junction isolation. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11685650-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10099917-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007170530-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007170438-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11488930-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003102552-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9758371-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6734550-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10541224-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10766768-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9440845-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8871551-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10192850-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10910341-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007170532-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007181962-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9434608-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10450190-B2 |
priorityDate |
2001-01-19^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |