http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2001006248-A1

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classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S257-93
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-033
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0086
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-761
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-761
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00
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filingDate 2001-01-19^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31f0515dab721c67e68b991ecb81921c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd4c176b4296ca6d1d38a8e2564ceae1
publicationDate 2001-07-05^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2001006248-A1
titleOfInvention Micromachined device having electrically isolated components and a method for making the same
abstract A micromachined structure having electrically isolated components is formed by thermomigrating a dopant through a substrate to form a doped region within the substrate. The doped region separates two portions of the substrate. The dopant is selected such that the doped region electrically isolates the two portions of the substrate from each other via junction isolation.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11685650-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10099917-B2
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007170438-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11488930-B1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9440845-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8871551-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10192850-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10910341-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007170532-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007181962-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9434608-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10450190-B2
priorityDate 2001-01-19^^<http://www.w3.org/2001/XMLSchema#date>
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