| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76834
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76885
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76888
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53223 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 |
| filingDate |
1999-04-27^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c9dee3b71630e936a8e2721452f119a1 |
| publicationDate |
2002-03-07^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2002027291-A1 |
| titleOfInvention |
Semiconductor device for preventing corrosion of metallic featues |
| abstract |
A semiconductor device and a manufacturing method thereof which enable corrosion of an Al-wiring to be prevented in the case where insulating film containing fluorine is in use. Al-wiring is formed on a silicon substrate, while etching Aluminum with photoresist as a mask. In this process, a natural oxide film is formed on side wall of the Al-wiring. There is eliminated the natural oxide film by physical etching due to inert gas such as argon and so forth or reactive etching such as BCl 3 and so forth under atmosphere of reduced pressure or a few existence of oxygen. In succession, there is formed high quality aluminum oxide film 6 a on the Al-side wall, while introducing oxygen or oxygen radical in a state of not breaking a vacuum. There is formed a fluorine contained interlayer insulating film 7 on a barrier of high quality aluminum oxide film 6 a. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112563195-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9735351-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007155027-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010096722-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7645618-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7863177-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009050468-A1 |
| priorityDate |
1998-04-30^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |