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publicationDate 2005-03-10^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2005050944-A1
titleOfInvention Sensor and method for manufacturing the same
abstract Provided is a sensor including a semiconductor substrate having a well of a membrane, a sensor, a heater, and an electrode, and a method for manufacturing the same, whereby it is possible to realize the sensor, which is a small size, stable, and mass produced.
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