abstract |
A sensor suitable for use as a viscosity sensor, a chemically selective sensor, or a chemically specific sensor. The sensor is a surface transverse wave (STW) or Love Wave device that, for solute concentration measurements, includes a chemically reactive layer selected to react with the solute to be measured. The surface trapping structure in this device can include dielectric material either as a protective coating or as the core material of the surface trapping structure. The substrate material and cut are selected so that only shear horizontal acoustic waves are produced. Nonpiezoelectric portions of this device can be utilized in the region in which chemicals react the sensor and/or in the region in which energy is converted between electrical and acoustical forms. |