http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005052092-A1

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http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0136
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00801
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0086
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01C19-5712
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01C19-5712
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filingDate 2002-09-05^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa541994d77832628121ba0e84d9eb2a
publicationDate 2005-03-10^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2005052092-A1
titleOfInvention Micromechanical component and method for producing same
abstract A micromechanical component and a method for producing the component are provided. The micromechanical component includes a substrate and a micromechanical functional layer of a first material provided over the substrate. The functional layer has a first and second regions, which are connected by a third region of a second material, and at least one of the regions is part of a movable structure, which is suspended over the substrate.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011084781-A1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10928199-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013247667-A1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005178208-A1
priorityDate 2001-10-20^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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