| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a5bf7bd954e2ee40fbb6aeaed9769fa2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_551c6a516d6d4e224bfcaa8655b4ccbc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ab49477b54a7fd5d378ea98ef606076e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1ef275d9db19c23e6407f1b487520d16 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76895
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76897
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B43-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B69-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-44 |
| filingDate |
2005-08-31^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4cb3347ea730766c7758cc20bae88198
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2dc3a8fe47127d3f8f4de43f1caf272c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d317edd529b9fd6c08534e11276b2f88
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0984fa829c0c9e5dd966d4a5dc8aaba6 |
| publicationDate |
2007-03-01^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2007048993-A1 |
| titleOfInvention |
Semiconductor product and method for forming a semiconductor product |
| abstract |
A semiconductor product includes a substrate having a substrate surface. A plurality of wordlines are arranged at a distance from one another and running along a first direction. A plurality of conductive contact structures are provided between the wordlines. The product also includes a plurality of filling structures. Each filling structure separates from one another two respective contact structures arranged between two respective wordlines. The two respective contact structures are arranged at a distance from one another in the first direction. In the preferred embodiment, the contact structures have a top side provided at a distance from the substrate surface and extends to the substrate surface. The contact structures at the substrate surface have a width along the first direction that is larger than a width of the top sides of the contact structures along the first direction. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7608505-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007148868-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008164511-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007077748-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008151592-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014264495-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9012282-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9406784-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009052250-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011084277-A1 |
| priorityDate |
2005-08-31^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |