http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011084277-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_063a1b324005ddc15e16e7529c6258c4 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-40114 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B41-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B43-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76837 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-40117 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-108 |
| filingDate | 2010-12-20^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ecd7e1434dbe5f82935cf6037db7e88 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92a3822411fbbf19377caff3e9f7dd75 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_443cc61cba1289eee7ba1a90dfda7a73 |
| publicationDate | 2011-04-14^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2011084277-A1 |
| titleOfInvention | Semiconductor memory device and its manufacturing method |
| abstract | A semiconductor memory device has a plurality of word line provided on a semiconductor region, extending in a row direction, a plurality of bit lines provided in the semiconductor region, extending in a column direction, and a plurality of memory elements provided at intersections between the plurality of word lines and the plurality of bit lines. Each word line provides a first gate electrode in the corresponding memory element. A lower portion of a side surface of each word line in a direction parallel to an extending direction of the word line is perpendicular to a main surface of the semiconductor region. An upper portion of the side surface is inclined so that a width thereof becomes smaller toward a top thereof. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104934378-A |
| priorityDate | 2007-08-21^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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