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filingDate 2008-07-07^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2008-12-04^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2008296516-A1
titleOfInvention Method and apparatus for specimen fabrication
abstract A specimen fabrication apparatus, including: an ion beam irradiating optical system to irradiate a sample placed in a chamber with an ion beam; a specimen holder to mount a specimen separated by the irradiation with the ion beam; a holder cassette to hold the specimen holder; a sample stage to hold, the sample and the holder cassette; and a probe to move the specimen to the specimen holder, wherein the holder cassette is transferred to outside of the chamber in a condition of holding the specimen holder with the specimen mounted.
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