| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1e96496a9949403e2af2ca913e65bfec |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q80-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q70-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q20-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q70-10 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-32 |
| filingDate |
2009-05-13^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34cdeab9f5b7a75bd570878995ed76c2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d634c87702d1df1e7e3aa8af68aa6c3 |
| publicationDate |
2010-03-11^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010059475-A1 |
| titleOfInvention |
Method of nanoscale patterning using block copolymer phase separated nanostructure templates |
| abstract |
A method of forming nanostructures using block copolymer nanostructure templates is disclosed herein. The method includes forming a nanostructure template by patterning a block copolymer on a substrate and allowing the block copolymer to phase separate to form the nanostructure template. The nanostructure template can then be loaded with a nanostructure precursor material. The nanostructure template is removed to form the nanostructure. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113514176-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011165341-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8261368-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010089869-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014039821-A1 |
| priorityDate |
2008-05-13^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |