| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0735063c180ad4979121af14f1c3ee19
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6965b3d4263c3738406c1cbe286d6475
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7c852d7a0e47e626b0296e83ae9782b7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0de18661dfc42a26161d0c3808e92336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3b1efe1f27f55a60a1aade92c33832ab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2e0de4bec486970794bea5302f148ca1 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q80-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q70-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q70-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q20-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q40-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-18 |
| filingDate |
2009-05-13^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-09-04^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_476bd6912d6d8d8e8ffa9e9422ccd25d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c740003d9d6652b4982fa21d49edddac
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be1413682170156eafbf11d36fc4a1e8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed4574e63a74b447bc95f98b33d3c50c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b4348f078f9848cef2d06e53a8dfbb11 |
| publicationDate |
2012-09-04^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8261368-B2 |
| titleOfInvention |
Nanomanufacturing devices and methods |
| abstract |
Devices for performing nanofabrication are provided which provide small volume reaction space and high reaction versatility. A device may include a reaction chamber adapted for nanoscale modification of a substrate and vacuum conditions; a scanning probe tip assembly enclosed within the reaction chamber; a first port coupled to the reaction chamber for delivering a gas; a second port coupled to the reaction chamber for applying a vacuum; and a substrate assembly insertedly mounted to the reaction chamber. The reaction chamber may include a body having one or more flexible walls and one or more supports to prevent the reaction chamber from collapsing under a vacuum. The device may further include an electrical conduit for coupling the tips of the scanning probe tip assembly to electrical components outside the reaction chamber. Also provided are apparatuses incorporating the devices and methods of using the devices and apparatuses. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9110093-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014289910-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8496999-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009258157-A1 |
| priorityDate |
2008-05-13^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |