| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_98e40b1a8421719cf6e9e0ae3a689caa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d1a6b44afd03481b972b1dd71a29fa0f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-8593 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30655 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F03B11-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05B1-02 |
| filingDate |
2010-08-19^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_87ec0953304b79ea23a0c14dd4949a71 |
| publicationDate |
2012-06-07^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2012138228-A1 |
| titleOfInvention |
Deep-trench silicon etching and gas inlet system thereof |
| abstract |
A deep-trench silicon etching apparatus, including a reaction chamber and a gas source cabinet, the gas source cabinet is connected to the reaction chamber via two independently controlled gas paths; wherein, a first gas path is used to introduce process gas for etch step from the gas source cabinet into the reaction chamber; a second gas path is used to introduce process gas for deposition step from the gas source cabinet into the reaction chamber. The present invention is used to solve the problems of gas mixture and gas delay occurring when process steps are switched. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103915330-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113948358-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017110292-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019295826-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11488812-B2 |
| priorityDate |
2009-08-27^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |