patent/US-5298112-A

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5298112-A

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fdad00677b9268c26e005a9e03a7b9dd
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02071 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-427
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
filingDate	1992-12-15^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	1994-03-29^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a751bbab8400e8b278328cfdc9fca7d7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e94b1c4cc40dc07c31ce0d657e38719 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8428c56d93cf84300738c3914f8ee5f2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f56fde2ddc2940dc8d74ce1710c0972b
publicationDate	1994-03-29^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-5298112-A
titleOfInvention	Method for removing composite attached to material by dry etching
abstract	A method and apparatus for removing a composite attached to a material to be treated by dry ashing using a gas including a halogen element and a gas including a hydrogen element or using a gas including fluorine, a gas including oxygen and a gas including chlorine in a reaction chamber containing the material therein for use in manufacturing a semiconductor device.
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6291139-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6880561-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7919005-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5919336-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005241952-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004259361-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7906030-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006166416-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5560803-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007077769-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6706334-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004108296-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003109144-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9425377-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5532447-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8968822-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008017316-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6776874-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008011332-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6981508-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7731862-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009061551-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6242165-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19860084-B4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7049243-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19939600-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6242368-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6770426-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5895272-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6913653-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20020053541-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6843258-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6667244-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6331380-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008286972-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6492277-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7432211-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004037768-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7758761-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7270724-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005031996-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012138228-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0173834-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5795831-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8198103-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5653851-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004216768-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007187362-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6010949-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007187359-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5651860-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002114745-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6432830-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-100426942-C http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6080680-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6297167-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5998305-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6080529-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005045276-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003121796-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002074013-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6939409-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9589787-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5700740-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5688410-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11005062-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005109733-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7244370-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6677244-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5683547-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009001524-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6440864-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1321977-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6458516-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6773683-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6660647-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I406333-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6666986-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5882537-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004151656-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009017259-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004069318-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009011065-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0039847-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005106888-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6024045-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5709757-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004058541-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007066076-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7259104-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014315723-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6120517-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10170724-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6692903-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008190558-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6232046-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100458591-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5503708-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0798767-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003192569-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0798767-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101969048-B
priorityDate	1987-08-28^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4818327-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-3714144-A1
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6432 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129602314 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6393 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129094243 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129327014 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6431

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