| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6f11e8b80ff63cd52fb88bb39774007c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c0b0a044b88c06b8a192e3649ab0f446
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f03d64d54b2225d35da0202e475c9f7a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9c1e47916fa944ab5367144d22cf002c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b6e90f8bbc630e12caf8e3ef832260b6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_760d82c9f593f28dc8a7b5f7ed593e7c |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-893 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3081
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3086
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0676
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate |
2010-10-14^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a012e4f9796202d0f99ed1c36a6c6731
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a667e24360586d45ce7d35fc9daf500e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bea5dcbced447cd1cd9435ed9d59e66e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2f39d87651a2c099bba03dd6d38c8da
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a34069b1750c09ac714a0df8a255e33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b9016abc673a9daae570703c8644fbe |
| publicationDate |
2013-02-28^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2013052762-A1 |
| titleOfInvention |
Method of forming an array of high aspect ratio semiconductor nanostructures |
| abstract |
A new method for forming an array of high aspect ratio semiconductor nanostructures entails positioning a surface of a stamp comprising a solid electrolyte in opposition to a conductive film disposed on a semiconductor substrate. The surface of the stamp includes a pattern of relief features in contact with the conductive film so as to define a film-stamp interface. A flux of metal ions is generated across the film-stamp interface, and a pattern of recessed features complementary to the pattern of relief features is created in the conductive film. The recessed features extend through an entire thickness of the conductive film to expose the underlying semiconductor substrate and define a conductive pattern on the substrate. The stamp is removed, and material immediately below the conductive pattern is selectively removed from the substrate. Features are formed in the semiconductor substrate having a length-to-width aspect ratio of at least about 5:1. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9343363-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8815104-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8729798-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8486843-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10003004-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8828765-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016248118-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9076903-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10290796-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9853324-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11355397-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10205080-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9595653-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9419198-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10749094-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D819627-S
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9515246-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10935702-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10134599-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11251318-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10644216-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9034216-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011263119-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020232025-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10374105-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10580955-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9263662-B2 |
| priorityDate |
2009-10-21^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |