http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9076903-B2

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filingDate 2014-01-08^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2015-07-07^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ddcc3cd1252165f244aaed2203514f5f
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publicationDate 2015-07-07^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9076903-B2
titleOfInvention Forming high-efficiency silicon solar cells using density-graded anti-reflection surfaces
abstract A method ( 50 ) is provided for processing a graded-density AR silicon surface ( 14 ) to provide effective surface passivation. The method ( 50 ) includes positioning a substrate or wafer ( 12 ) with a silicon surface ( 14 ) in a reaction or processing chamber ( 42 ). The silicon surface ( 14 ) has been processed ( 52 ) to be an AR surface with a density gradient or region of black silicon. The method ( 50 ) continues with heating ( 54 ) the chamber ( 42 ) to a high temperature for both doping and surface passivation. The method ( 50 ) includes forming ( 58 ), with a dopant-containing precursor in contact with the silicon surface ( 14 ) of the substrate ( 12 ), an emitter junction ( 16 ) proximate to the silicon surface ( 14 ) by doping the substrate ( 12 ). The method ( 50 ) further includes, while the chamber is maintained at the high or raised temperature, forming ( 62 ) a passivation layer ( 19 ) on the graded-density silicon anti-reflection surface ( 14 ).
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