http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014342646-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_129e393582e6bdf4029baf2206522f45
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8dd390ce4836ca72a290d6486d7894b5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3b28f3e8863e25b088019317fdcba0db
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8bd460962b55a25fd74ff53cc2e2eeb8
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-20
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-20
filingDate 2012-09-14^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31e9c56834c165403967b1147196dc61
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a39aca777eb95c458b9bd8c0cf76a841
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_55369ecfd89097f0628f97bd669e8de4
publicationDate 2014-11-20^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2014342646-A1
titleOfInvention Polishing pad
abstract A polishing pad at least includes a polishing layer, and a cushion layer, in which a plurality of holes is provided in the polishing layer, the holes passing through the polishing layer in a thickness direction, and a plurality of grooves is provided in a polishing surface of the polishing layer, a through hole ratio is from 0.13% or more to 2.1% or less, and angles made by the polishing surface and side surfaces of the groove, which continue to the polishing surface, is from 105 degrees or more to 150 degrees or less.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10252396-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014141704-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014378035-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9114501-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10071461-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014154962-A1
priorityDate 2011-09-16^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82312
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129802038
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128156919
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12215
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID91537
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5271568
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13539
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410764212
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID53811985
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54556980
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5459894
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425742778
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128157721
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416224576
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID136198857
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127975977
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID638144
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128666970
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413414069
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19810763
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426064910
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422013838
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556374
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66666
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54111924
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61012
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19810762
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5271567
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414862570
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128704008
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415720477
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128242511
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13709798
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129602189
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413850786
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409346481
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127781782
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549602
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415790169
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422729824
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7773
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128516121
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128471922
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID84544
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128288294
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6556
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12201
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409344292
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID637568
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419588247
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7769
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID136073998
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129929627
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12713
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129476784
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129968609
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426064909
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID74978
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127653340
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129566472
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12585297
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128340117
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16891
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129244694
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7352
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13662
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424955067
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8906
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128238905
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129183656
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414017907
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID34763
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17869
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4346656
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3033874
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12905475
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425503721

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