| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45519
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45578
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45544
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45591
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45551 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
| filingDate |
2015-05-08^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e1eb5749b9648572e83a4dc6fabf4ab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_33ddba1299c62fac1867011467a85e70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc6bd908cf5f93b564bc3e65921e38ae
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b478886fef5467f469ce0c7c3f3f7df8 |
| publicationDate |
2015-11-19^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2015329964-A1 |
| titleOfInvention |
Film Forming Apparatus |
| abstract |
There is provided a film forming apparatus including a raw material gas nozzle provided with gas discharge holes for discharging a mixed gas of a raw material gas and a carrier gas; a flow regulating plate portion extended along the longitudinal direction of the raw material gas nozzle; a central region configured to supply a separating gas from a center side within a vacuum container toward a substrate loading surface of a rotary table; a protuberance portion protruded from the flow regulating plate portion toward the rotary table at a position shifted toward a center side of the rotary table from the gas discharge holes; and a protuberance portion configured to restrain the separating gas from flowing between the flow regulating plate portion and the rotary table; and an exhaust port configured to vacuum exhaust the interior of the vacuum container. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10669631-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11274372-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10041172-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106583876-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017335453-A1 |
| priorityDate |
2014-05-16^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |