| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-30477
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N50-01 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B6-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02071 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B6-00 |
| filingDate |
2015-08-17^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8316bb3ee053c191788a8e7e619c2f0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27d34464fd165bc2c877560dc488f4fa |
| publicationDate |
2016-02-18^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2016045942-A1 |
| titleOfInvention |
Method and apparatus for removing residue layer |
| abstract |
A method of removing a residue layer formed on a side surface of each of a plurality of convex-shaped structure which stands together on a surface of a substrate or a side surface of a concave-shaped structure formed on the substrate, includes disposing an electrostatic lens between the substrate and a charged particle irradiation mechanism which linearly irradiates a beam of charged particles onto the substrate. The electrostatic lens diverges the beam of charged particles. |
| priorityDate |
2014-08-18^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |