| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_164d5f8f72ba1dbe32461dddbece8196
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9bb7100e5331dce66af72bccec18cad7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b4dafd85228164d131b6fa87c412bc02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ed89ca88042d3b6f7afc21d7b6dd7b87
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_539d40d41cd2f07b89e45ba636ae6f7b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-121
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-151 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-15 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J3-14 |
| filingDate |
2010-12-29^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c5ead4336238f26e679154097194994
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6fe913ff187aef7ecca46a277e555c14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e568ee6b752dafe117d8b7b1a72afe6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f32c8698630afbfa53a30638e880a0c3 |
| publicationDate |
2012-07-05^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2012168637-A1 |
| titleOfInvention |
Method and apparatus for controlling an electrostatic lens about a central ray trajectory of an ion beam |
| abstract |
A method of controlling deflection of a charged particle beam in an electrostatic lens includes establishing a symmetrical electrostatic lens configuration comprising a plurality of electrodes disposed at unadjusted positions that are symmetric with respect to the central ray trajectory with applied unadjusted voltages that create fields symmetric with respect to the central ray trajectory. A symmetric electric field is calculated corresponding to the set of unadjusted voltages. A plurality of lower electrodes is arranged at adjusted positions that are asymmetric with respect to the central ray trajectory. A set of adjusted voltages is obtained for the plurality of lower electrodes, wherein the set of adjusted voltages corresponds to a set of respective potentials of the symmetric electric field at respective adjusted asymmetric positions. The adjusted voltages are applied to the asymmetric lens configuration when the charged particle beam passes therethrough. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9721750-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021011156-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10522330-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102445818-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016045942-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9281162-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107690689-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10886098-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10804068-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11495434-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I794557-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016365225-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113643956-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I794558-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200092407-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10468224-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I764190-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I785164-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11437215-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018166261-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10790116-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021118696-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10410844-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021090845-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11037758-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017092473-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10937624-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021055115-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018517263-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D956005-S
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020106426-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020106425-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11011343-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019125860-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019198283-A1 |
| priorityDate |
2010-12-29^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |