| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cd8dff0cc6d024e095d5decaf9202f49 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4588
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-54 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458 |
| filingDate |
1968-07-12^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1971-07-20^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f543e3308deac314eee4b1c265abe645 |
| publicationDate |
1971-07-20^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-3594227-A |
| titleOfInvention |
Method for treating semiconductor slices with gases |
| abstract |
PROCESS FOR DEPOSITION OF EPITAXIAL AND DIELECTRIC FILMS IS DISCLOSED. MOLYBDENUM DISCS FOR HOLDING SEMICONDUCTOR SILCES ARE MOUNTED FOR ROTATIONAL MOVEMENT IN A NEARVERTICAL PLANE AND FOR TRANSLATION ALONG A LOCUS OF POINTS SUBSTANTIALLY EQUIDISTANT FROM A HEAT SOURCE. THE DISCS IN ONE EMBODIMENT ARE RESTED AGAINST THE INCLINED SIDES OF A ROTATING FRUSTOCONICAL HOUSING WITH THEIR EDGES IN CONTACT WITH A HORIZONTAL TRACK. A DEPOSITION CHAMBER ENVELOPING THE APPARATUS PROVIDES DOWNWARD GAS FLOW. OUTSIDE RF COILS ENCIRCLE THE CHAMBER. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8540818-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3690290-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2001036013-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3783821-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4839145-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011308456-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5002011-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010269754-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4848272-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3793068-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4858558-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5472592-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6784033-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4681652-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8608854-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4376796-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4709655-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6204197-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4796562-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3796182-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5803971-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4696833-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011155055-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3757733-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0325663-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0457415-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3704987-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5151133-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1271620-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3783822-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-8905871-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3957547-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4329938-A |
| priorityDate |
1968-07-12^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |