| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate |
1971-10-26^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1973-11-27^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b77482e5fa6b748894d648e36884658 |
| publicationDate |
1973-11-27^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-3775201-A |
| titleOfInvention |
Method for polishing semiconductor gallium phosphide planar surfaces |
| abstract |
An improved method for polishing gallium phosphide planar surfaces is disclosed comprising positioning gallium phosphide wafers or slices in close adjacency to a polishing medium providing a relative motion between said wafer and polishing medium while providing a controlled predetermined flow of OBr ions to said wafers and polishing medium and continuing the relative motion until the wafer surface is polished to a smooth and featureless condition whereupon the wafers are washed and removed from the polishing mechanism. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4043861-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3979239-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4448634-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6395194-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4080245-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3869324-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012276816-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3869323-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9067296-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6699402-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5137544-A |
| priorityDate |
1971-10-26^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |