| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76283
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-117
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-085
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76278
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-928
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-924 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76264
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-8222
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-535
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-535
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-822
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8222
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-73
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-331
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
1973-03-12^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1976-03-16^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a007d49a87d9e8764fc02867c13e5bb7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b911980b4eff540820f849d085b45350 |
| publicationDate |
1976-03-16^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-3944447-A |
| titleOfInvention |
Method for fabrication of integrated circuit structure with full dielectric isolation utilizing selective oxidation |
| abstract |
Structure: An integrated circuit structure with full dielectric isolation comprising a supporting substrate having a planar surface of dielectric material and a semiconductor layer on said dielectric surface which forms a planar interface with the surface. Regions of oxidized silicon extend through the layer from said interface, surrounding and dielectrically isolating pockets of silicon in the layer; the oxidized silicon regions extend to the upper surface of the semiconductor layer where they are substantially co-planar with the silicon pockets. The devices of the integrated circuit are formed in said silicon pockets. n Method: The structure is fabricated by a novel method wherein a lightly doped silicon layer is deposited on a highly doped silicon substrate; surrounding oxidized silicon regions are then formed by selectively thermally oxidizing portions of the silicon layer to form oxide regions which are co-extensive with the oxidized areas and, thus, are co-planar with the remaining silicon pockets at both surfaces of the layer; a member having a dielectric surface interfacing with the silicon layer is formed, and the silicon substrate is removed by preferential electrochemical anodic etching to leave the silicon layer having the oxidized regions surrounding spaced silicon pockets mounted on said member. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5557149-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6121119-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014184259-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009070987-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0164646-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0164646-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5592022-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4810667-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5488012-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5789817-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5403729-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4131910-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10295591-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5920779-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5807780-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4232328-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4897698-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4487639-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5280194-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4888304-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5656547-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5441898-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8148191-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-8001335-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5444009-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9005997-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4889832-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4131909-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005094932-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5455187-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7872212-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5521420-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7465903-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009071540-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6143646-A |
| priorityDate |
1973-03-12^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |