| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8d27c2d06b81bb6e3c42ba3a6d327dc8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3eeac7038a74f2a67c3379835144e32b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_078dae6b2eabdc04f60db3bb9077cf77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eccd894c99fea2d1c0c8735872bb2309
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4dd109d764f689b2c78a76237aa7b8db
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f35cd3dc2160d59ed6ef664fd1805471 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-547 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-02168
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-0216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-0216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18 |
| filingDate |
2008-10-07^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-04-03^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1884ce3445099db88cea18fad3769343
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c13883ce69970764f71e5544d52ec06c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a48279b567517d3786c25966e6ff0f9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c47196eda151bf1dfa47ea9b49b9e355
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef40adbfc0153bef42b77a09ce202434 |
| publicationDate |
2012-04-03^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8148191-B2 |
| titleOfInvention |
Combined etching and doping media |
| abstract |
The present invention relates firstly to HF/fluoride-free etching and doping media which are suitable both for the etching of inorganic layers and also for the doping of underlying layers. The present invention secondly also relates to a process in which these media are employed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1939294-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011309489-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8501604-B2 |
| priorityDate |
2001-10-10^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |