| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_94fff2216f5a387cfbeff2f1a7331cd4 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-09 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 |
| filingDate |
1980-10-09^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1982-09-21^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9fef98eee3421cebcd1fbc72f55eb50a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_523aec2594e59adfc0800db9e51cd355 |
| publicationDate |
1982-09-21^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-4350537-A |
| titleOfInvention |
Semiconductor annealing by pulsed heating |
| abstract |
A process for annealing crystal damage in ion implanted semiconductor devices in which the device is rapidly heated to a temperature between 450 DEG and 900 DEG C. and allowed to cool. It has been found that such heating of the device to these relatively low temperatures results in rapid annealing. In one application the device (17) may be heated on a graphite element (14) mounted between electrodes (15) in an inert atmosphere in a chamber (11). The process may be enhanced by the application of optical radiation from a Xenon lamp (19). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10119947-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4469529-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004229443-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9519641-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4432809-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4421479-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5950723-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6403925-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5514885-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5830277-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4486652-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5252498-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5298749-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6144057-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4525221-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5429985-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006289433-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4743569-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5775416-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4481406-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5629532-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4751193-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5406081-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5279973-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4433246-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4576652-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7745762-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5665210-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7335570-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6002109-A |
| priorityDate |
1979-10-17^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |