http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5389153-A

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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0e433c1625fc509a087c912b440da84b
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32229
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32192
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
filingDate 1993-02-19^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 1995-02-14^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f088d5f5d79dd0b3739428620dc71f3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4ddb776dbc4b9bf2c49dac7485e10097
publicationDate 1995-02-14^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-5389153-A
titleOfInvention Plasma processing system using surface wave plasma generating apparatus and method
abstract A surfatron 12 is provided which includes first waveguide 32 coupled to a section of coaxial waveguide 30 to define a cavity 28 at the intersection therebetween. The coaxial waveguide 30 includes an outer cylinder 36 and an inner cylinder 34 disposed within the outer cylinder 36. Inner cylinder 34 has an end disposed proximate to a wall of first section of waveguide 32. A space 40 is defined between the end of inner cylinder 34 and the wall of waveguide 32. A discharge tube 22 is provided having a first portion disposed within inner cylinder 34 and a second portion extending through space 40 between the end of inner cylinder 34 and the wall of waveguide 32. A coil 38 is disposed around the portion of discharge tube 22 extending through space 40 between the end of inner cylinder 34 and the wall of waveguide 32.
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