patent/US-5397897-A

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5397897-A

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_692dc75829481c48c017b52f352e2bad
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-095 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-20
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J5-20
filingDate	1993-04-19^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	1995-03-14^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4360187be61e3e7ae39f4fc43a2b8e2c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af1bc9ee01e5c4b278c133eeb747b5db http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e909ca9722064575ea56867bf5abfddd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_988d17097e69fc7656dab000b9b4b332
publicationDate	1995-03-14^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-5397897-A
titleOfInvention	Infrared sensor and method for production thereof
abstract	An infrared sensor including a substrate provided with a bridging part; a detecting part composed of an infrared temperature-sensitive film formed in the bridging part; an electrode pad formed of a laminate film and an etchant-resistant electrically conductive film electrically connected to the infrared temperature-sensitive film; a first lid covering the detecting part and the bridging part; and a second lid covering another surface of the substrate and tightly closing a cavity formed between the substrate and the bridging part.
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priorityDate	1992-04-17^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
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isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129735795 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6575

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