| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_60e21de07fa18fc54e2150daffc14654 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G21K1-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-26 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21K1-06 |
| filingDate |
1993-11-01^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1995-05-09^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1cbf30a8313b514b04ee18b637d906d5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb362574a1f39be05d9c2f062c8114c7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_092a8e87381e5494e868a6bda8b4caaa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0dedd4ccec9ce023cd29c7affe99ae1d |
| publicationDate |
1995-05-09^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5414746-A |
| titleOfInvention |
X-ray exposure mask and fabrication method thereof |
| abstract |
An X-ray exposure mask comprises an X-ray transmission layer and an X-ray absorption layer formed on the X-ray transmission layer and being patterned. The X-ray absorption layer has a first region having a first thickness and a second region having a second thickness less than the first thickness. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102955354-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102955354-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03034476-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5906910-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7197108-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6043164-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5914202-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5936707-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6526038-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9223198-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005074676-A1 |
| priorityDate |
1991-04-22^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |