| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31732
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2111-94
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-855
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B9-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B9-149 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q60-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C26-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q30-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-0027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y35-00 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B9-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C26-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q30-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q60-10 |
| filingDate |
1994-01-21^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1996-04-23^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b8c865cfff9a1da78610b0cb21b260df
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_02c87a7cfd822231f3d8876ba63ce2b1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3cad01c23e939d84640b862cb28b5ff1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d9602dc5114474b739bcf5d2a23db0b |
| publicationDate |
1996-04-23^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5510614-A |
| titleOfInvention |
Solid surface observation method and apparatus therefor, and electronic apparatus formed of the solid surface observation apparatus and method of forming the electronic apparatus |
| abstract |
A surface of an insulator or semiconductor substrate is irradiated with a beam such as an electron beam, an electromagnetic wave beam, an ion beam, etc. to excite carriers so as to form an electrical conductive layer on the surface of and in the inside of the substrate to thereby make it possible to perform observation and micro working on the insulator by using a scanning tunneling microscope. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6262426-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5889282-A |
| priorityDate |
1993-01-21^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |