| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8381805eba6d034fc77bd230dd02e6e2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L61-06 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L61-06 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L61-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D133-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 |
| filingDate |
1997-01-27^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1999-04-06^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_62b5edc14332f92ddbf6d07614309178 |
| publicationDate |
1999-04-06^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5891959-A |
| titleOfInvention |
Polymeric anti-reflective compounds |
| abstract |
Anti-reflective coatings and methods for forming these anti-reflective coatings are disclosed that have a polymer chemistry and optical characteristics suitable for suppressing the light that reflects off a circuit substrate during a photo-lithographic process. These anti-reflective coatings include a phenolic polymer material and an epoxide-containing polymer material that can be combined in a select proportion to form a thermally curable polymeric anti-reflective coating. The select proportions of the combined materials tailors the optical characteristic of the anti-reflective coating to attenuate energy about a select range of wavelengths. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6828542-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6820028-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7817773-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1484645-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6807503-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7053355-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6803554-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6806456-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1484645-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004230396-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008165916-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003128870-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004222354-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6759297-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7233874-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6599682-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003199166-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004148120-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004162692-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004140418-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6969864-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6645867-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6602652-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003226951-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6969837-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6959255-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004098216-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005125184-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7824844-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6090523-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6744848-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6906305-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6884984-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6892156-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6410209-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008176165-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6879924-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008087546-A1 |
| priorityDate |
1994-03-04^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |