| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a42999aaebd86cb44ac15ed1a10959c0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B61-22 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N50-01 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8246 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L43-12 |
| filingDate |
2003-02-28^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2004-07-06^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_25f00c696bc1437abae42ac21d0026f4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_68ea5659b4dce767e12880232093b7fe |
| publicationDate |
2004-07-06^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6759297-B1 |
| titleOfInvention |
Low temperature deposition of dielectric materials in magnetoresistive random access memory devices |
| abstract |
The invention provides a low temperature process for depositing silicon nitride or silicon dioxide dielectric films over magnetically active materials in the manufacture of MRAM devices and MRAM devices produced by the method. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022127718-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10593450-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10597769-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003137028-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10593449-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11479845-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11655537-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11170933-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11361889-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7473656-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005087519-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010314360-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005274984-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10347411-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10358717-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6958932-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008308537-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11222742-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11367569-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8105445-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8470092-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10607759-B2 |
| priorityDate |
2003-02-28^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |